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Microcavity Discharge Device Research

  The Optical Physics and Engineering Lab has developed and patented a microscale hollow cathode device which will emit light in the VUV, UV and visible range using a plasma discharge. This device has many commercial applications, including use as gas laser, display, miniature calibration light source, sensor, and any place where a high-power and high-resolution lighting source can be implemented. Currently we are fabricating various types of these devices and studying their properties and plasma phenomena. Most fabricated devices are aimed at commercialization. 

Click on the link below to read more about the development of microdischarge technology at the University of Illinois.
http://www.otm.uiuc.edu/techs/featured/microdischarge-devices.asp 
 

 

 

(Left) 50 micron diameter- Flexible Microdischarge Array (U of I)
Working Voltage: 152V, Current: 4.7mA DC at 300 Torr Neon

(Right) 10 × 10  (50 micron)2 microdischarge arrays based on Silicon

 

 

  

 

Nanomaterials News, July 2007

Volume 3 Issue 9

" Aluminium foil lamps could soon outshine fluorescent lights"

 

 

Journal of Physics D:Applied Physics Cover, June 2005

Volume 38 Number 11

 

Laser Focus World Cover,  April 2005

" Microdischarge devices reach large pixel counts "

 

Applied Physics Letters Cover, June 2003

Laser Focus World  September 2000 (Volume 38, Issue 9) 
" Microdischarge array is flexible "

 

Selected publications on microdischarge devices:

- 2007

 

10. K.S. Kim, S.-J. Park, and J. G. Eden, Journal of Physics D: Applied Physics, vol. 41, n. 1. “Self-Patterned Aluminum Interconnects and Ring Electrodes for Arrays of Microcavity Plasma Devices Encapsulated in Al2O3”

9. B. J. Ricconi, S. -J. Park, S. H. Sung, P. A. Tchertchian, J. G. Eden, Electronics Letters, 43, 1194, 2007. " Ultraviolet emission from OH and ArD in microcavity plasma devices"

8. S. -J. Park, K.S. Kim, A. J. Price, P.A. Tchertchian, P. -Y, Chen, J. K. Yoon and J. G. Eden, Digest of Technical Papers - SID International Symposium, v 38, n 1, p 538-541, 2007. " Large scale arrays of microcavity plasma devices based on encapsulated Al/Al2O3 electrodes: Device characteristics as a plasma display pixel and low cost wet chemical fabrication processing"

7. Robert Ginn, Steven Solomon, Sung-Jin Park, J. G. Eden, Jeff Guy, and Ed Peters,  Proc. SPIE, 6544, 2007.  " Versatile plasma display technology for UV-visible scene projector "

6. S. -J. Park, J. D. Readle, A. J. Price, J. K. Yoon and J. G. Eden, J. Phys. D: Appl. Phys.,  v 40, No. 13, 3907-3913, 2007. " Lighting from thin (<1 mm) sheets of microcavity plasma arrays fabricated in Al/Al2O3/glass structures: planar, mercury-free lamps with radiating areas beyond 200 cm2"

5. Robert Ginn, Steven Solomon, S. -J. Park, J. G. Eden, Jeff Guy, and Ed Peters,  Proc. SPIE 6544, 65440F, 2007. " Versatile plasma display technology for UV-visible scene projector"

4. B. J. Ricconi, S. -J. Park, S. H. Sung, P. A. Tchertchian, J. G. Eden, Applied Physics Letters, v 90, n 20, 2007, p 201504. " OH (A 2Σ+) and rare gas-deuteride (NeD, ArD) excimers generated in microcavity plasmas : Ultraviolet emission spectra and formation kinetics"

3. J. M. Hafez, J. Gao, and J. G. Eden, Applied Physics Letters, v 90, n 13, 26, p 132502-1-3. " Detection of weak (~0.5-300 nT), low frequency (5-100 Hz) magnetic fields at room temperature by kilohertz modulation of the magneto-optical hysteresis in rare earth-iron garnet films"

2.  S. -J. Park, P. A. Tchertchian, S. -H. Sung, T. M. Spinka, and J. G. Eden, IEEE Transactions on Plasma Science, v 35, n 2, April 2007, p 215-22. " Arrays of addressable microcavity plasma devices

1. J. L. Putney, K. E. Keister, C. J. Wagner, and J. G. Eden, 2006 IEEE LEOS Annual Meeting Conference, 2006, p 2 pp. " Microwave interferometric measurements of the electron density generated by sub-picosecond 100 GW KrF laser pulses in air"

 

- 2006

21. M. Lu, S. -J. Park, J. G. Eden, and B. T. Cunningham, accepted to JMEMS (Journal of Microelectromechanical Systems), 2006. " Microplasma devices and arrays fabricated by plastic-based replica molding"

20. S. -J. Park, K. S. Kim, A. Y. Chang, L. Z. Hua, J. C. Asinugo, T. Mehrotra, T. M. Spinka, and J. G. Eden, Applied Physics Letters, 89, 221501, 2006. " Confinement of nonequilibrium plasmas in microcavities with diamond or circular cross sections: Sealed arrays of Al/Al2O3/glass microplasma devices with radiating areas above 20  cm2 "

19. J. H. Seo, and J. G. Eden, Journal of Applied Physics, Vol. 100, n 123302, 2006. " Two-Dimensional Simulation of AC-Driven Microplasmas Confined to 100-300 µm Diameter Cylindrical Microcavities".

18. S. -J. Park; J.G. Eden, K. Jain, M.A. Klosner, Japanese Journal of Applied Physics, 45, 10B, 8221-8224, 2006. " Flexible arrays of Ni/polyimide/Cu microplasma devices with a dielectric barrier and excimer laser ablated microcavities"

17. S.-J. Park, T. M. Spinka, and J. G. Eden, Applied Physics Letters, 89, 031502, 2006. "Linear arrays of ceramic microcavity plasma devices (127–180  µm diameter) driven by buried coplanar electrodes: Shaping the intracavity electric field and emission profile "

16. J. G. Eden, S.-J. Park, Proceedings of 2006 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Digest of Technical Papers, p 473-476, 2006. " Arrays of microcavity plasma devices: Versatile platform for the next generation of plasma displays"

15. P. A. Tchertchian, S. -H. Sung, T. L. Kim, S. -J. Park, J. G. Eden, Bulletin of The American Physical Society, vol. 51, n 5, 2006. " Addressable Silicon Microplasma Arrays: Discharge Properties for Pixelized Microcavities having a Multi-Electrode Geometry"

14. K. S. Kim, J. D. Readle, T. M. Spinka, L. Z. Hua, S. -J. Park, and J. G. Eden, Bulletin of The American Physical Society, vol. 51, n 5, 2006. “ Confinement of Plasmas in Microcavities with Diamond or Circular Cross Sections and Driven by Al2O3 Encapsulated Electrodes”

13. J. F. Zachary, J. P. Blue, R. J. Miller, B. J. Ricconi, J. G. Eden and W. D. O’Brien, Ultrasound in Medicine & Biology, v 32, n 11, p 1763-1770, 2006. " Lesions of ultrasound-induced lung hemorrhage are not consistent with thermal injury"

12. J.G. Eden, S.-J. Park, Physics of Plasmas, v 13, n 5, p 057101, 2006. " New opportunities for plasma science in nonequilibrium low-temperature plasmas confined to microcavities: There's plenty of room at the bottom"

11. C.J. Wagner, and J.G.Eden, Chemical Physics Letters, v 422, n 4-6, p 372-377, 2006. " Gerade Rydberg states of Xe2 probed by laser spectroscopy in the afterglow of a Xe microplasma: Ωg <- a3 Σu+ ( 1u, Ou- ) transitions in the near-infrared (675-800 nm)"

10. Robert Ginn, Steven Solomon, P. R. Mackin, Sung-Jin Park, J. G. Eden, and Carol Wedding, Proceeding of SPIE - The International Society for Optical Engineering, v 6208, Technologies for Synthetic Environments: Hardware-in-the-Loop Testing XI, 2006, p 62080O " Visible/UV image projector for sensor testing"

9. S. -J. Park, J. D. Readle, A.Y. Chang, L. Z. Hua,  K. S. Kim, J. G. Eden, Proceeding of IEEE 33rd International Conference on Plasma Science (ICOPS), 2006, p360. " Flexible Al/Al2O3/SIO2 microplasma arrays: large area ultraviolet source for biomedical applications"

8. S. -J. Park; J.G. Eden, Proceeding of IEEE 33rd International Conference on Plasma Science (ICOPS), 2006, p405. " Microcavity plasma devices: new concepts for the high resolution plasma displays"

7. T. M. Spinka, S. -J. Park, J.G. Eden, Proceeding of IEEE 33rd International Conference on Plasma Science (ICOPS), 2006, p408. " Linear arrays of ceramic microcavity plasma devices (127-180 /spl mu/m diameter) driven by buried coplanar electrodes"

6. S.-H. Sung, P. A. Tchertchian, B. J. Ricconi, K.-F. Chen, S.-J. Park, J. G. Eden, Proceeding of IEEE 33rd International Conference on Plasma Science (ICOPS), 2006, p410. " Efficient UV emission of addressable pixel arrays of Si microplasma devices"

5. J.G. Eden, S.-J. Park and K.S. Kim, Plasma Sources Science and Technology, 15, S67-S74, 2006. " Arrays of nonequilibrium plasmas confined to microcavities : an emerging frontier in plasma science and its applications"

4. J.G. Eden, Proceedings of the IEEE, v 94, n 3, March, 2006, p 567-574, " Information display early in the 21st century: Overview of selected emissive display technologies"

3. K.H. Becker, K.H. Schoenbach, J.G.  Eden, Journal of Physics D: Applied Physics, v 39, n 3, p R55-R70, 2006. " Microplasmas and applications"

2. K.-F. Chen, N. P. Ostrom, S.-J. Park, and J. G. Eden, Applied Physics Letters, v 88, 061121, 2006, " One quarter million (500×500)  pixel arrays of silicon microcavity plasma devices: Luminous efficacy above 6  lumens/watt with Ne/50% Xe mixtures and a green phosphor"

1. S.-J. Park, K. S. Kim, and J. G. Eden, Journal of Applied Physics, Vol. 99, n 026107, 2006. " Ultraviolet emission intensity, visible luminance, and electrical characteristics of small arrays of Al/Al2O3 microcavity plasma devices operating in Ar/N2 or Ne at high-power loadings" 

 

- 2005

20. J.G. Eden, and S.-J. Park, Plasma Physics and Controlled Fusion, Vol. 47, n 12B, pp B83-B92, 2005, " Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications"

19. N.P. Ostrom,and J.G. Eden, Applied Physics Letters, v 87, n 14, p 141101-1-3, 2005, " Microcavity plasma photodetectors: photosensitivity, dynamic range, and the plasma-semiconductor interface"

18. S.-J. Park, K.-F. Chen, S.-H. Sung, C. J. Wagner, and J. G. Eden, Journal of the Society for Information Display, Vol. 13, n 11, pp949-954, 2005, " Implications of microcavity plasma devices for new plasma-display-panel cell structures with improved luminosity"

17. S.-J. Park, K.-F. Chen, S.-H. Sung, T.M. Spinka, and J.G. Eden, IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005, n 2, IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005, 2005, p 1495-1498, " Arrays of microcavity plasma devices: Concepts for future plasma displays"

16. Kim, S.-O. and Eden, J.G., International Display Manufacturing Conference and Exhibition, IDMC'05, Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05, 2005, p 83-84, " DC operated microdischarge devices for high resolution plasma display panel"

15. J.G. Eden, S.-J. Park, N.P. Ostrom, K.-F. Chen, K.S. Kim, IEEE/OSA Journal of Display Technology, vol. 1, n 1, pp112-117, 2005, “ Large Arrays of Microcavity Plasma Devices for Active Displays and Backlighting”

14. J.G. Eden, S.-J. Park, N.P. Ostrom and K.-F. Chen, Journal of Physics D : Applied Physics, 38, p1644-1648, 2005, " Recent advances in microcavity plasma devices and arrays : a versatile photonic platform"

13. S.-J. Park, K.S. Kim, and J.G. Eden, 32nd IEEE International Conference on Plasma Science, 2005, " UV Generation In Microcavity Plasma Devices With Encapsulated Al2O3/Al Electrodes"

12. S.-J. Park, K.-F. Chen, N. P. Ostrom, and J. G. Eden, 32nd IEEE International Conference on Plasma Science, 2005, " One Quarter Million Pixel Arrays Of AC Excited Si Microplasma Devices"

11. S.-J. Park, K.S. Kim, and J.G. Eden, Applied Physics Letters, 86, 221501, 2005. " Nanoporous Alumina As A Dielectric For Microcavity Plasma Devices: Multilayer Al/Al2O3 Structures”

10. S.-O. Kim,  and J.G. Eden, IEEE Photonics Technology Letters, 17(7), p 1543-5, 2005, " Arrays of microplasma devices fabricated in photodefinable glass and excited AC or DC by interdigitated electrodes"

9. N.P. Ostrom,and J.G. Eden, IEEE Transactions on Plasma Science,  33(2), p 578-579, 2005. " Visible and near-ultraviolet emission Characteristics of Ne, Ar, and Ar/N2 excited in silicon microcavity discharge arrays"

8. N.P. Ostrom,and J.G. Eden, IEEE Transactions on Plasma Science,  33(2), p 576-577, 2005. "Visible emission contours for neon plasmas in silicon microcavity discharge devices: pressure dependence of spatially resolved fluorescence above the anode plane"

7. S.-J. Park,and  J.G. Eden, IEEE Transactions on Plasma Science, 33(2), p 572-573, 2005, " Microdischarge devices with a nanoporous Al2O3 dielectric: Operation in Ne and air"

6. S.-J. Park, and J.G. Eden, IEEE Transactions on Plasma Science, 33(2), p 570-571, 2005. " Stable microplasmas in air generated with a silicon inverted pyramid plasma cathode"

5. C.J. Wagner, and J.G. Eden, IEEE Transactions on Plasma Science, 33(2), p 568-569, 2005. " Xenon microdischarge at 300-800 torr : laser spectroscopy of Xe2 a3 "

4. S.-O. Kim,  and J.G. Eden, IEEE Transactions on Plasma Science, 33(2), p 566-567, 2005. " Arrays of square cross-section microdischarge devices fabricated in glass and driven by interdigitated electrodes"

3. J.H. Cho, K.-W. Lee, S.-J. Park and J.G. Eden, IEEE Transactions on Plasma Science, 33(2), p 378-379, 2005. " Coplanar ac discharges between cylindrical electrodes with a nanoporous alumina dielectric: Modular dielectric barrier plasma devices"

2. S.-J. Park, K.-F. Chen, N. P. Ostrom, and J. G. Eden, Applied Physics Letters, 86(11),  p1-3, 2005. " 40 000 pixel arrays of ac-excited silicon microcavity plasma devices"

1. S.-J. Park, K.-F. Chen, N.P. Ostrom, and J.G. Eden, Electron. Lett., 41(6), p311-312, 2005. "Arrays of AC-excited, silicon microdischarge devices as large as 40000 (200 x 200) pixels: electrical and optical characteristics for operation in neon"

 

- 2004

7. S.-J. Park, J. Chen, C. Liu ,and J.G. Eden, Appl. Phys. Lett., 85(21), 2004.  " Microdischarge devices with 10 or 30 micron square silicon cathode cavities: pd scaling and production or the XeO excimer"

6. S.-J. Park, K.-H. Park ,and J.G. Eden, Appl. Phys. Lett., 84(22), p4481-4483, 2004. " Carbon nanotube-enhanced performance of microplasma devices"

5. S.-J. Park, K.-F. Chen ,and J. G. Eden, Lasers and Electro-Optics Society (LEOS). The 17th Annual Meeting of the IEEE, 1 ,2004. " Flexible microdischarge arrays:large scale fabrication and AC operation"

4. N.P. Ostrom and J.G. Eden, Lasers and Electro-Optics Society (LEOS). The 17th Annual Meeting of the IEEE, 1 ,2004. " Photodetection with silicon pyramidal microdischarge devices"

3. S.-J. Park, K.-F. Chen ,and J. G. Eden, Lasers and Electro-Optics Society (LEOS). The 17th Annual Meeting of the IEEE, 1 ,2004. " Large scale arrays of microdischarge devices fabricated in Si"

2. N.P. Ostrom, B.A.  Vojak, and J.G. Eden, Plasma Sources Science and Technology, 13( 2), 2004. " Radio frequency (10 - 23 MHz) - assisted excitation of a microdischarge with a piezoelectric transformer"

1. S.-J. Park, K.-H. Park ,and J.G. Eden, Electronic Letters, 40(9), 2004. " Integration of carbon nanotubes with microplasma devices cathodes: reduction in operating and ignition voltages"

 

- 2003

6. N.P. Ostrom, S.-J. Park, J.J. Ewing, J.G. Eden, 2003 IEEE LEOS Annual Meeting Conference Proceedings, 2003.  " Photodetection in the visible and near-infrared with a silicon pyramidal microdischarge device"

5. J.G. Eden, S.-J.Park, N.P. Ostrom, S.T. McCain, C.J. Wagner, B.A. Vojak, J. Chen, C. Liu, P von Allmen, F. Zenhausern, D.J. Sadler, C. Jensen, D.L. Wilcox, and J.J. Ewing, J. Phys. D: Appl. Phys., 36, 2003. " Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: arrays, emitters and photodetectors"

4. J.G. Eden, Proceedings of SPIE - The International Society for Optical Engineering, 5231, 2003. "Microdischarge arrays in ceramic and semiconductor multilayer structures: Photonic devices for emission and detection"

3. P. von Allmen, D.J. Sadler, C. Jensen, N.P. Ostrom, S.T. McCain, B.A. Vojak, and J.G. Eden, Appl. Phys. Lett., 82(25), 2003. " Linear, segmented microdischarge array with an active length of ~1 cm: cw and pulsed operation in the rare gases and evidence of gain on the 460.30 nm transition of Xe+"

2. S.-J. Park and J.G. Eden, Electronic Letters, 39(10), 2003. " Electrical characteristics and lifetimes of microdischarge devices having thin dielectric films of aluminium oxied, boron nitride, or barium titanate"

1. P. von Allmen, S.T. McCain, N.P. Ostrom, B.A.Vojak, F.Zenhausern, C.Jensen, M. Oliver ,and J.G.Eden ,Appl. Phys. Lett., 82(16), 2003. " Ceramic microdischarge arrays with individually ballasted pixels"

 

 - 2002

7. S.-J. Park, J. Chen, C. Liu ,and J.G.Eden, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Conference Edition (IEEE Cat. No.02CH37337), 2002. " Microdischarge devices on the 10 ~ 30 mu m scale: fabrication and applications"

6. S.-J. Park, J.J. Ewing and J.G. Eden, Appl. Phys. Lett., 81(24), 2002. " Photodetection in the visible, ultraviolet, and near-infrared with silicon microdischarge devices"

5. S.-J. Park and J.G. Eden, Appl. Phys. Lett., 81(22), 2002. " 13-30 micron diameter microdischarge devices: Atomic ion and molecular emission at above atmospheric pressures"

4. C.J. Zietkiewicz, B.A. Knecht, C.M. Herring, N.P. Ostrom, and Eden, J.G., Optical and Quantum Electronics, 34(10), 2002. " Design and performance of a transverse discharge, UV-preionized mercury-bromide laser"

3. J. Chen, S.-J. Park, Z. Fan,C. Liu ,and  J.G. Eden, Journal of Microelectromechanical Systems, 11(5), 2002. " Development and Characterization of Micromachined Hollow Cathode Plasma Display Devices"

2. C.J. Wagner, N.P. Ostrom,S.-J. Park, J. Gao ,and J.G.Eden, IEEE Transactions on Plasma Science, 30(1), 2002. " Reduction in the Breakdown Voltage of a High-Pressure Discharge With an Array of 200-400 micron Diameter Microdischarges: Application to Arc Lamp Ignition"

1. S.-J. Park, J. Chen, C.J. Wagner, N.P. Ostrom, C. Liu ,and J.G.Eden, IEEE Journal on Selected Topics in Quantum Electronics, 8(2), 2002 " Microdischarge Arrays: A New Family of Photonic Devices"

 

- 2001

12. S.-J. Park, J. Chen, C. Liu, J.J.Ewing ,and J.G. Eden,Optics Letters,26(22),2001 " Arrays of silicon microdischarge devices with multicomponent dielectics"

11. J. Chen, S.-J. Park, C. Liu, and J.G. Eden, TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, 2001. " Microdischarge device fabricated in silicon by micromachining technique with pyramidal cavity"

10. C.J. Wagner, S.-J. Park, and J.G. Eden, Appl. Phys. Lett., 78, 709, 2001 " Excitation Of A Microdischarge Device With A Reverse-Biased pn Junction "

9. S.-J. Park, J. Chen, C. Liu and J.G. Eden, Appl. Phys. Lett., 78(4),  419, 2001.  " Silicon Microdischarge Devices Having Inverted Pyramidal  Cathodes: Fabrication and Performance of Arrays "

8. J.G. Eden, NTIS, Jan 2001, 7p. " Microdischarges and Rare Earth-Doped Waveguide Devices: Visible and Ultraviolet Sources for Lasers and Sensors"

7. J.G. Eden, C.J. Wagner, J.Gao, N.P. Ostrom, and S.-J. Park, Appl. Phys. Lett., 79(26), 2001. " Microdischarge array-assisted ignition of a high-pressure discharge: Application to arc lamps"

6. S.-J. Park, J. Chen, C. Liu and J.G. Eden, Appl. Phys. Lett., 79(13), 2001.  "Independently addressable subarrays of silicon microdischarge devices: Electrical characteristics of large (30×30) arrays and excitation of a phosphor"

5. S.-J. Park, J. Chen,  C. Liu, and J.G. Eden, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170), 2001. " Large scale microdischarge arrays: fabrication and characterization"

4. S.-J. Park, C.J. Wagner, and J.G. Eden, IEEE Photo. Tech. Lett., 2001. " Performance of  Microdischarge Devices and Arrays with Screen Electrodes "

3. S.-J. Park, J.G. Eden, 2001 Digest of LEOS Summer Topical Meetings: Advanced Semiconductor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components (IEEE Cat. No.01TH8572), 2001. " Microdischarge arrays: a new family of UV sources"

2. S.-J. Park, J. Chen, C. Liu and J.G. Eden, Elect. Lett., 2001. " Arrays Of Microdischarge Devices Having 50-100 um Square Pyramidal Si Anodes and Screen Cathodes "

1. B.A.Vojak, S.-J. Park, C.J. Wagner, J. G.Eden et.al. Appl. Phys. Lett., 2001. " Multi-Stage, Monolithic Ceramic Microdischarge Device Having An Active Length of ~220 microns"

 

- 2000

2. S.-J. Park, C.J. Wagner, C.M. Herring, and J.G. Eden, Appl. Phys. Lett., 77(2), 199, 2000,  " Flexible Microdischarge Arrays: Metal/Polymer  Devices "

1. S.-J. Park,C.J. Wagner, and J.G. Eden, LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080), 2000. " New microdischarge devices and arrays: flexible metal/polymer structures and Si pyramidal devices"

 

~1999

5. P.C. John , D.J. Wheeler, J.W. Frame, and J.G. Eden, IEEE Trans. Plasma Sci., 27(1), 48, 1999,  “Observation of individual particles and Coulombic solids in a microdischarge”

4. J.W. Frame, P.C. John, T.A. DeTemple, and  J.G. Eden, Appl. Phys. Lett. 72(21) 2634, 1998,  " Continuous-wave emission in the ultraviolet  from diatomic excimers in a microdischarge " 

3. J.W. Frame, P.C. John, B. Bozeman, D.J. Wheeler,  T.A. DeTemple, and J.G. Eden, Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243), 1998. "Characteristics of microdischarge devices in silicon"

2. J.W. Frame, and  J.G. Eden, Elect. Lett., 34(15), 1529, 1998, " Planar  microdischarge arrays "

1. J.W. Frame, D.J. Wheeler, T.A. DeTemple, and  J.G. Eden  Appl. Phys. Lett. 71(9) 1165, 1997, " Microdischarge devices fabricated  in silicon " 

      

The patent can be found at the US Patent Web Page:

http://164.195.100.11/netahtml/srchnum.htm
 

Patent # 6,016,027,  # 6,139,384, # 6,194,833, # 6,563,257, # 6,695,664, # 6,815,891 in their searchable directory
 

 

 

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